A Novel Lamé Mode RF-MEMS resonator with high quality factor
Zeji Chen, Tianyun Wang, Qianqian Jia, Jinling Yang, Quan Yuan, Yinfang Zhu, Fuhua Yang
Topics & Concepts
ResonatorThermoelastic dampingMicroelectromechanical systemsBiasingMaterials scienceQ factorResonance (particle physics)OptoelectronicsVoltageRadio frequencyAcousticsElectrical engineeringElectronic engineeringEngineeringPhysicsAtomic physicsMeteorologyThermalAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators