Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures
A. Ababneh, Ahmad Dagamseh, Zaid Albataineh, M. Tantawi, Qais M. Al‐Bataineh, Mahmoud Telfah, T. Zengerle, H. Seidel
Topics & Concepts
Materials scienceThin filmSputteringWurtzite crystal structureRefractive indexSputter depositionTransmittanceBand gapCrystalliteAluminium nitrideOptoelectronicsNitrideMolar absorptivityAnalytical Chemistry (journal)OpticsAluminiumComposite materialNanotechnologyLayer (electronics)MetallurgyChemistryChromatographyZincPhysicsGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties