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Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

A. Ababneh, Ahmad Dagamseh, Zaid Albataineh, M. Tantawi, Qais M. Al‐Bataineh, Mahmoud Telfah, T. Zengerle, H. Seidel

2021Microsystem Technologies34 citationsDOI

Topics & Concepts

Materials scienceThin filmSputteringWurtzite crystal structureRefractive indexSputter depositionTransmittanceBand gapCrystalliteAluminium nitrideOptoelectronicsNitrideMolar absorptivityAnalytical Chemistry (journal)OpticsAluminiumComposite materialNanotechnologyLayer (electronics)MetallurgyChemistryChromatographyZincPhysicsGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties
Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures | Litcius