Electrochemical etching of n-type GaN in different electrolytes

Jie Liu, Jishi Cui, Hongdi Xiao

2024Journal of Alloys and Compounds11 citationsDOI

Topics & Concepts

ElectrolyteNanoporousEtching (microfabrication)Materials scienceNanoporeElectrochemistryAnodizingChemical engineeringNanotechnologyPorosityAnodeChemistryComposite materialElectrodeLayer (electronics)AluminiumPhysical chemistryEngineeringGaN-based semiconductor devices and materialsGa2O3 and related materialsAnodic Oxide Films and Nanostructures