Capacitive pressure sensors based on microstructured polymer-derived SiCN ceramics for high-temperature applications
Chao Ma, Chanyu Xiong, Rui Zhao, Kang Wang, Mengmeng Yang, Yi Liang, Mingliang Li, Daoyang Han, Hailong Wang, Rui Zhang, Gang Shao
Topics & Concepts
Materials scienceCapacitive sensingCeramicHysteresisPressure sensorRepeatabilitySensitivity (control systems)Composite materialTemperature measurementPolymerOptoelectronicsElectronic engineeringElectrical engineeringMechanical engineeringThermodynamicsChemistryEngineeringPhysicsChromatographyQuantum mechanicsAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsElectrical and Thermal Properties of Materials