Mechanical properties measurement of materials and devices at micro- and nano-scale by optical methods: A review
Mengxiong Liu, Xide Li
Topics & Concepts
NanotechnologyMaterials scienceScale (ratio)Characterization (materials science)MicroscopeMechanical engineeringComputer scienceOpticsEngineeringPhysicsQuantum mechanicsForce Microscopy Techniques and ApplicationsMechanical and Optical ResonatorsNear-Field Optical Microscopy