A low-power embedded poly-Si micro-heater for gas sensor platform based on a FET transducer and its application for NO2 sensing
Gyuweon Jung, Yoonki Hong, Seongbin Hong, Dongkyu Jang, Yujeong Jeong, Wonjun Shin, Jinwoo Park, Donghee Kim, Chan Bae Jeong, Dong Uk Kim, Ki Soo Chang, Jong-Ho Lee
Topics & Concepts
Materials scienceTransducerElectrodeOptoelectronicsPower consumptionPower (physics)Electrical engineeringTinNanotechnologyEngineeringChemistryPhysical chemistryMetallurgyPhysicsQuantum mechanicsGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Chemical Sensor Technologies