An overview of conventional and new advancements in high kappa thin film deposition techniques in metal oxide semiconductor devices
Premdass Devaray, Sharifah Fatmadiana Wan Muhamad Hatta, Yew Hoong Wong
Topics & Concepts
Materials scienceThin filmChemical vapor depositionDielectricSilicon dioxideAtomic layer depositionPhysical vapor depositionOptoelectronicsSiliconNanotechnologyHigh-κ dielectricOxideSemiconductorDeposition (geology)DopingEngineering physicsMetallurgyPaleontologyEngineeringBiologySedimentSemiconductor materials and devicesCopper Interconnects and ReliabilityAdvancements in Semiconductor Devices and Circuit Design