Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films
João Resende, D. Fuard, Delphine Le Cunff, J.H. Tortai, Bernard Pélissier
Topics & Concepts
Band gapX-ray photoelectron spectroscopyEllipsometryThin filmMaterials scienceRefractive indexAnalytical Chemistry (journal)Molar absorptivityDielectricOpticsOptoelectronicsChemistryNanotechnologyPhysicsNuclear magnetic resonanceChromatographySemiconductor materials and devicesOptical Coatings and GratingsThin-Film Transistor Technologies