Sustainable ITO films with reduced indium content deposited by AACVD
Tianlei Ma, M. Missous, Gergő Pintér, Xiangli Zhong, Ben F. Spencer, Andrew G. Thomas, David J. Lewis
Abstract
In–Sn–O thin films with reduced indium content were synthesised by aerosol-assisted chemical vapor deposition as transparent conductors.
Topics & Concepts
Materials scienceIndiumChemical engineeringChemical vapor depositionNanotechnologyOptoelectronicsEngineeringZnO doping and propertiesThin-Film Transistor TechnologiesGas Sensing Nanomaterials and Sensors