CVD diamond-SiC composite films: Structure and electrical properties
А. Ф. Попович, Artem Martyanov, А.А. Khomich, Pavel V. Fedotov, Sergey Savin, Vadim Sedov, Victor Ralchenko
Topics & Concepts
DiamondMaterials scienceChemical vapor depositionRaman spectroscopyMaterial properties of diamondSilicon carbideMicrocrystallineThin filmSilanePlasma-enhanced chemical vapor depositionComposite materialSiliconChemical engineeringNanotechnologyOptoelectronicsChemistryCrystallographyOpticsPhysicsEngineeringDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesMetal and Thin Film Mechanics