Nano material removal mechanism of 4H-SiC in ion implantation-assisted machining
Y. H. Fan, Zongwei Xu, Ying Song, Bing Dong, Zhifu Xue, Bing Liu, Lei Liu, Dongyu Tian
Topics & Concepts
Nano-MachiningMechanism (biology)Materials scienceIon implantationIonNanotechnologyMetallurgyComposite materialChemistryPhysicsOrganic chemistryQuantum mechanicsAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research