Influence of substrate bias voltage on microstructure and mechanical characteristics of TiAlSiN coating deposited by High Power Impulse Magnetron Sputtering (HiPIMS)
Chayan Ranjan Das, Mufaddal Rangwala, Amitava Ghosh
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceBiasingCoatingMicrostructureComposite materialGrain sizeSputter depositionSubstrate (aquarium)SputteringVoltageThin filmNanotechnologyElectrical engineeringGeologyEngineeringOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis