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Fabrication and performance characterization of deep UV photodetectors based on magnetron sputtered ZnGa2O4 thin films

Kang Ling, Kuangkuang Li, Ruyu Bai, Bowen Zhao, Xingzhao Liu

2022Materials Science in Semiconductor Processing14 citationsDOI

Topics & Concepts

Materials scienceResponsivityPhotodetectorOptoelectronicsUltravioletThin filmSubstrate (aquarium)Sputter depositionSapphireDark currentFabricationPhotoelectric effectSputteringOpticsNanotechnologyLaserPhysicsPathologyOceanographyMedicineGeologyAlternative medicineGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Fabrication and performance characterization of deep UV photodetectors based on magnetron sputtered ZnGa2O4 thin films | Litcius