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Mechanical performance of high-entropy (AlCrNbSiTi)N films fabricated by high-power impulse magnetron sputtering over a wide compositional window

Ching-Yin Lee, Peng-Hsi Chen, Su-Jien Lin, Jien‐Wei Yeh

2023Ceramics International16 citationsDOI

Topics & Concepts

High-power impulse magnetron sputteringMaterials scienceHigh entropy alloysMicrostructureCrystalliteAlloySputter depositionAnnealing (glass)SputteringComposite materialCoatingMetallurgyCemented carbideCarbideThin filmNanotechnologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies
Mechanical performance of high-entropy (AlCrNbSiTi)N films fabricated by high-power impulse magnetron sputtering over a wide compositional window | Litcius