Mechanical performance of high-entropy (AlCrNbSiTi)N films fabricated by high-power impulse magnetron sputtering over a wide compositional window
Ching-Yin Lee, Peng-Hsi Chen, Su-Jien Lin, Jien‐Wei Yeh
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceHigh entropy alloysMicrostructureCrystalliteAlloySputter depositionAnnealing (glass)SputteringComposite materialCoatingMetallurgyCemented carbideCarbideThin filmNanotechnologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies