Role of alumina particles in chemical-mechanical synergies in ruthenium polishing
Hongyu Di, Ping Zhou, Yunxiang Lu, Ke Yang, Dongming Guo
Topics & Concepts
Chemical-mechanical planarizationZeta potentialSlurryOxideMaterials scienceChemical engineeringSurface roughnessPolishingChemical reactionAbrasiveHydrogen peroxideParticle sizeSurface finishInorganic chemistryChemistryNanoparticleMetallurgyComposite materialNanotechnologyOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced materials and compositesForce Microscopy Techniques and Applications