Investigation on the influence of the gas flow mode around substrate on the deposition of diamond films in an overmoded MPCVD reactor chamber
B. Wang, Jun Weng, Z.T. Wang, J.H. Wang, F. Liu, Liwei Xiong
Topics & Concepts
DiamondScanning electron microscopeVolumetric flow rateRaman spectroscopySubstrate (aquarium)Materials scienceAnalytical Chemistry (journal)PlasmaDeposition (geology)Flow (mathematics)OpticsChemistryComposite materialMechanicsPhysicsGeologyQuantum mechanicsOceanographyPaleontologySedimentChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices