High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System
Guanghui Li, Changchun Cai, Yan Zhang, Xiong Deng, Liangzhong Lin, Wenbo Xiao
Abstract
In this article, a novel optical micro-electromechanical system (MEMS) acceleration sensor based on a metal Fabry–Pérot (FP) microcavity is investigated using the transfer matrix method (TMM) and finite element analysis (FEA). The analytical calculation and simulation results show that the accelerometer has a wide measurement range, high sensitivity and resolution, good linearity, and low cross-axis sensitivity over the whole wavelength modulation range. The accelerometer has a linear measurement range of ±251 g, an optical system sensitivity of 1.9038, a mechanical sensitivity of 10.92 nm/g, a cross-axis sensitivity on the orthogonal axis as low as 0.09%, an accelerometer sensitivity up to 20.79 nm/g, and a resolution of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$48.10~\mu \text{g}$ </tex-math></inline-formula> ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\delta \lambda $ </tex-math></inline-formula> = 1 pm). These functional characteristics make the proposed sensor have important application prospects in the fields of portable devices, biomedicine, and the Internet of Things, as well as autonomous driving and aerospace.