Effect of oxygen flow ratio on crystallization and structural characteristics of gallium oxide thin films
Meng Li, Wei Mi, Liwei Zhou, Jinshi Zhao, Xinrong Chen, Jinze Tang, Xinwei Li, Guang Zhang, Kailiang Zhang, Chongbiao Luan, Xingcheng Zhang, Mingsheng Xu
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyThin filmScanning electron microscopePhotoluminescenceAnalytical Chemistry (journal)MicrostructureCrystallizationSubstrate (aquarium)GalliumSputter depositionOxideOxygenSputteringComposite materialChemical engineeringNanotechnologyOptoelectronicsMetallurgyChemistryEngineeringChromatographyGeologyOceanographyOrganic chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques