Polycrystalline CVD diamond wafer polished by molten iron erosion
Haochen Zhang, Zengyu Yan, Hanxu Zhang, Zhipeng Song, Guangchao Chen
Topics & Concepts
PolishingDiamondWaferMaterials scienceX-ray photoelectron spectroscopySurface roughnessChemical vapor depositionMetallurgyDissolutionCrystalliteChemical-mechanical planarizationRaman spectroscopyComposite materialChemistryChemical engineeringNanotechnologyOpticsPhysical chemistryPhysicsEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesTunneling and Rock Mechanics