Litcius/Paper detail

SMT2020—A Semiconductor Manufacturing Testbed

Denny Kopp, Michael Hassoun, Adar Kalir, Lars Mönch

2020IEEE Transactions on Semiconductor Manufacturing58 citationsDOI

Abstract

We present a new set of simulation models, organized in a testbed. The aim of the testbed consists in providing researchers with a platform able to credibly represent the complexity of modern semiconductor manufacturing. The testbed is open to public use, and include so far four models. A high-volume/low-mix model and a low-volume/high-mix model constitutes the foundation of the testbed. Two additional models incorporate the complexity of engineering lots. We conclude this paper by presenting a case study that demonstrates that the third and fourth model can be used to assess the performance of integrated dispatching strategies for production and engineering lots.

Topics & Concepts

TestbedComputer scienceSemiconductor device fabricationSet (abstract data type)Volume (thermodynamics)EngineeringSystems engineeringComputer networkElectrical engineeringProgramming languageWaferPhysicsQuantum mechanicsScheduling and Optimization AlgorithmsAdvanced Manufacturing and Logistics OptimizationOptimization and Packing Problems