Molecular dynamics simulations of internal stress evolution in ultrathin amorphous carbon films subjected to thermal annealing
Shengxi Wang, K. Komvopoulos
Topics & Concepts
Annealing (glass)Materials scienceAmorphous solidMolecular dynamicsStress (linguistics)CrystalliteThin filmComposite materialAmorphous carbonChemical physicsNanotechnologyNanometreCrystallographyChemistryMetallurgyComputational chemistryPhilosophyLinguisticsDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesMetal and Thin Film Mechanics