Molybdenum disulfide thin films fabrication from multi-phase molybdenum oxide using magnetron sputtering and CVD systems together
Ayşe Karataş, Mücahit Yılmaz
Topics & Concepts
Materials scienceMolybdenum disulfideSputter depositionMolybdenumBand gapThin filmSputteringOptoelectronicsCavity magnetronPhysical vapor depositionPhotoluminescenceFabricationNanotechnologyComposite materialMetallurgyMedicineAlternative medicinePathology2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applications