Preparation of pure hydrogenated amorphous silicon film via PECVD method as anode materials for high-performance lithium-ion batteries
Binbin Shi, Yue Zou, Guojun Xu, Chuanbin Tu, Chenxin Jin, Fugen Sun, Yong Li, Hui Li, Lang Zhou, Zhihao Yue
Topics & Concepts
Materials scienceAnodeSiliconPlasma-enhanced chemical vapor depositionAmorphous siliconAmorphous solidLithium (medication)Silicon monoxideChemical engineeringAnnealing (glass)NanotechnologyComposite materialOptoelectronicsCrystalline siliconElectrodeChemistryOrganic chemistryMedicineEndocrinologyPhysical chemistryEngineeringAdvancements in Battery MaterialsSupercapacitor Materials and FabricationSemiconductor materials and devices