Tribological study of hafnium dioxide and aluminium oxide films grown by atomic layer deposition on glass substrate
R. Pietruszka, B.S. Witkowski, S. Zimowski, Tomasz Stapiński, M. Godlewski
Topics & Concepts
Materials scienceTribologyLayer (electronics)Substrate (aquarium)Thin filmAtomic layer depositionAluminiumScratchMicrocrystallineSilicon dioxideAluminium oxideComposite materialDelamination (geology)OxideZirconium dioxideDeposition (geology)MetallurgyNanotechnologyChemistryCrystallographyOceanographySubductionSedimentTectonicsBiologyPaleontologyGeologySemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignIntegrated Circuits and Semiconductor Failure Analysis