Effect of the addition of zirconium on the electrical, optical, and mechanical properties and microstructure of ITO thin films
Ying-Tsung Li, Dian-Ting Chen, Chang-Fu Han, Jen Fin Lin
Topics & Concepts
Materials scienceCrystallinityMicrostructureGrain sizeSurface roughnessElectrical resistivity and conductivityThin filmDopingComposite materialTransmittanceIndium tin oxideZirconiumMetallurgyLayer (electronics)OptoelectronicsNanotechnologyEngineeringElectrical engineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor Technologies