Growth and comparison of high-quality MW PECVD grown B doped diamond layers on {118}, {115} and {113} single crystal diamond substrates
Andrew Taylor, Simona Baluchová, Ladislav Fekete, Ladislav Klimša, Jaromı́r Kopeček, Daniel Šimek, Martin Vondráček, Luděk Míka, Jan Fischer, Karolina Schwarzová‐Pecková, V. Mortet
Topics & Concepts
DiamondMaterials sciencePlasma-enhanced chemical vapor depositionDopingBoronCrystal (programming language)Chemical vapor depositionAnalytical Chemistry (journal)ElectrodeCrystallographyNanotechnologyOptoelectronicsChemistryComposite materialPhysical chemistryOrganic chemistryProgramming languageChromatographyComputer scienceDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of OxidesSemiconductor materials and devices