Effect of bias voltages and interlayer design on microstructure, mechanical properties, and adhesion performance of AlCrSiN coatings deposited using HiPIMS
Jian-Fu Tang, I-Hong Chen, Bo-Ruei Lu, Chi-Lung Chang
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMicrostructureBiasingResidual stressSputter depositionComposite materialSubstrate (aquarium)CoatingElectron microprobeGrain sizeSputteringMetallurgyVoltageThin filmNanotechnologyElectrical engineeringEngineeringOceanographyGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials