Study of the deposition of nanopillar-patterned 4H-SiC by molecular dynamics simulation
Lianghao Xue, Gan Feng, Gai Wu, Shizhao Wang, Rui Li, Xu Han, Yameng Sun, Sheng Liu
Topics & Concepts
NanopillarMaterials scienceSubstrate (aquarium)Surface roughnessDislocationDeposition (geology)Surface finishThin filmMolecular dynamicsNanoscopic scaleComposite materialNanotechnologyNanostructureChemistryComputational chemistryBiologyOceanographyGeologySedimentPaleontologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchCopper Interconnects and Reliability