Towards monolithic low-loss silicon nitride waveguides on a mature 200 mm CMOS platform
Bin Li, Donghao Li, Bo Tang, Peng Zhang, Yan Yang, Ruonan Liu, Ling Xie, Zhihua Li
Topics & Concepts
Materials scienceSilicon nitrideOptoelectronicsPhotonicsSilicon photonicsWaferSilicon on insulatorLaser linewidthSiliconHybrid silicon laserChemical vapor depositionLOCOSWaveguideNitrideOpticsNanotechnologyLayer (electronics)LaserPhysicsPhotonic and Optical DevicesNeural Networks and Reservoir ComputingAdvanced Fiber Laser Technologies