24.7% industrial tunnel oxide passivated contact solar cells prepared through tube PECVD integrating with plasma-assisted oxygen oxidation and in-situ doped polysilicon
Shuai Ma, Baochen Liao, Fei Qiao, Dong Ding, Chao Gao, Zhengping Li, Rui Tong, Xiangyan Kong, Wenzhong Shen
Topics & Concepts
Plasma-enhanced chemical vapor depositionPassivationMaterials scienceSolar cellWaferSaturation currentOxideSiliconChemical engineeringOptoelectronicsNanotechnologyLayer (electronics)VoltageElectrical engineeringMetallurgyEngineeringSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence