Ultrathin molybdenum disulfide (MoS2) film obtained in atomic layer deposition: A mini-review
Junjie Yang, Youqiang Xing, Ze Wu, Peng Huang, Lei Liu
Topics & Concepts
Atomic layer depositionMolybdenum disulfideFabricationMaterials scienceNanotechnologyMolybdenumCrystallinityLimitingDeposition (geology)HomogeneousLayer (electronics)Chemical engineeringMetallurgyComposite materialEngineeringThermodynamicsAlternative medicinePathologyMechanical engineeringBiologyMedicinePhysicsSedimentPaleontology2D Materials and ApplicationsFerroelectric and Negative Capacitance DevicesMXene and MAX Phase Materials