Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing
Chen–Fu Chien, Wei-Tse Hung, Chin-Wei Pan, Tran Hong Van Nguyen
Topics & Concepts
Manufacturing engineeringSemiconductor device fabricationProduction (economics)MetrologyEngineeringProcess (computing)Control (management)Production controlAdvanced process controlSmart manufacturingProcess controlComputer scienceSystems engineeringArtificial intelligenceElectrical engineeringMacroeconomicsWaferMathematicsStatisticsOperating systemEconomicsIndustrial Vision Systems and Defect DetectionManufacturing Process and OptimizationDigital Transformation in Industry