Electrostatic levitation: an elegant method to control MEMS switching operation
Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
Topics & Concepts
StictionLevitationElectrodeVoltageMaterials scienceMicroelectromechanical systemsOptoelectronicsElectrical engineeringEngineeringPhysicsMagnetQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies