Research on high-quality and low-damage liquid film shearing polishing of 4H-SiC and its surface/subsurface damage evolution
Hongyu Chen, Hongbing Wan, Yujie Yang, Binghai Lyu, Te Zhu, Peng Zhang, Xingzhong Cao, Qiu Xu, Wei Hang
Topics & Concepts
PolishingMaterials scienceShearing (physics)AbrasiveSurface roughnessChemical-mechanical planarizationSilicon carbideComposite materialPositron annihilation spectroscopySurface finishPassivationTransmission electron microscopyFabricationIsotropic etchingScanning electron microscopeSemiconductorCarbideMetallurgySiliconSurface layerGrindingSemiconductor device fabricationNano-Vacancy defectAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisCopper Interconnects and Reliability