On mechanisms influencing etching/polymerization balance in multi-component fluorocarbon gas mixtures
Alexander Efremov, Hye Jun Son, Gilyoung Choi, Kwang‐Ho Kwon
Topics & Concepts
FluorocarbonChemistryKineticsIonPlasmaPolymerizationPlasma modelingAnalytical Chemistry (journal)Etching (microfabrication)Plasma etchingOrganic chemistryPolymerQuantum mechanicsPhysicsLayer (electronics)Plasma Diagnostics and ApplicationsMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research