Synergic strategies of composition-modified bilayer channel configuration and ozone-processed gate stacks for atomic-layer deposited In-Ga-Zn-O thin-film transistors
Soohyun Bae, Seo-Hyun Moon, Young Ha Kwon, Nak-Jin-Seong, Kyu-Jeong Choi, Sung‐Min Yoon
Topics & Concepts
BilayerMaterials scienceAnnealing (glass)Thin-film transistorOptoelectronicsThreshold voltageTransistorAtomic layer depositionThin filmAnalytical Chemistry (journal)Layer (electronics)NanotechnologyChemistryVoltageComposite materialElectrical engineeringMembraneBiochemistryEngineeringChromatographyThin-Film Transistor TechnologiesZnO doping and propertiesGa2O3 and related materials