Effect of nitrogen partial pressure on the piezoresistivity of magnetron sputtered ITO thin films at high temperatures
Zhichun Liu, Junsheng Liang, Hao Zhou, Hongyi Sun, Wenqi Lu, Biling Wang, Qiang Li, Xin Zhao, Dazhi Wang, Jun Xu
Topics & Concepts
Thin filmX-ray photoelectron spectroscopyAnalytical Chemistry (journal)Partial pressureMaterials scienceSputter depositionBand gapNitrogenFermi levelCavity magnetronSputteringElectronOxygenChemistryNanotechnologyOptoelectronicsNuclear magnetic resonancePhysicsQuantum mechanicsOrganic chemistryChromatographyAdvanced Sensor Technologies ResearchElectrical and Thermal Properties of MaterialsSensor Technology and Measurement Systems