Improved p-GaN/AlGaN/GaN HEMTs with magnetronsputtered AlN cap layer
Mao Jia, Bin Hou, Ling Yang, Zhiqiang Xue, Qian Xiao, Meng Zhang, Hao Lu, Mei Wu, Xitong Hong, Jiale Du, Qingyuan Chang, Xiao Wang, Yang Li, Jin‐Ping Ao, Xiaohua Ma, Yue Hao
Topics & Concepts
Layer (electronics)Materials scienceOptoelectronicsCavity magnetronHigh-electron-mobility transistorWide-bandgap semiconductorGallium nitrideSputteringComposite materialTransistorThin filmElectrical engineeringNanotechnologyVoltageEngineeringGaN-based semiconductor devices and materialsSemiconductor Quantum Structures and DevicesPhotocathodes and Microchannel Plates