Oxidation anisotropy of 4H-SiC wafers during chemical-mechanical polishing
Wantang Wang, Xuesong Lu, Xinke Wu, Rong Wang, Deren Yang, Xiaodong Pi, Xiaodong Pi
Topics & Concepts
Materials sciencePolishingWaferAnisotropyChemical-mechanical planarizationComposite materialMetallurgyNanotechnologyOpticsPhysicsSilicon Carbide Semiconductor TechnologiesAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesis