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Direct Laser Patterning of Free-Standing RGO Electrodes for Wearable Capacitive Pressure Sensors

Jiarui Zhang, Yuqing Liu, Jichao Li, Hao Zhou, Jianan Ma, Ang Li, Yiting Wang, Hongle Zhu, Dong‐Dong Han, Yong‐Lai Zhang

2022IEEE Photonics Technology Letters14 citationsDOI

Abstract

Graphene-based flexible pressure sensors are promising for cutting-edge applications, for instance, e-skins, human-machine interaction, and wearable health-monitoring devices. However, the development of free-standing graphene electrodes with well-designed patterns is still challenging. Herein, we report the direct laser patterning of a pair of free-standing reduced graphene oxide (RGO) electrodes with complementary helical microstructures for developing high-performance capacitive pressure sensors (CPSs). A commercially available porous tape was sandwiched between the two RGO electrodes. The design and fabrication of the complementary helix-shaped RGO electrodes are essential for developing CPSs with improved sensing performance. The resultant CPSs enable dual-mode sensing detection (pressure and proximity) with a high sensitivity of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim 0.95$ </tex-math></inline-formula> kPa−1. As a proof-of-concept application, the RGO-based CPS has been employed as wearable electronics for finger motion monitoring.

Topics & Concepts

GrapheneCapacitive sensingWearable computerMaterials scienceElectrodePressure sensorNanotechnologyWearable technologyFabricationOptoelectronicsElectronicsComputer scienceElectrical engineeringMechanical engineeringEmbedded systemEngineeringPhysicsMedicineQuantum mechanicsOperating systemPathologyAlternative medicineAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsConducting polymers and applications