Input-guidance diffusion model for unknown defect patterns detection in wafer bin map
Seokho Moon, Seoung Bum Kim
Topics & Concepts
BinWaferDiffusionData miningComputer scienceArtificial intelligenceReliability engineeringEngineeringAlgorithmElectrical engineeringPhysicsThermodynamicsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques