High-quality c-axis oriented Al(Sc)N thin films prepared by magnetron sputtering
Mei Wang, Huating Bo, Aobo Wang, Zhengwang Cheng, Shengjia Li, Wei Zou, Jing He, Xinguo Ma
Topics & Concepts
Materials scienceCrystallinityThin filmResidual stressPiezoelectricitySputter depositionWaferSputteringPiezoelectric coefficientNitrideComposite materialOptoelectronicsDopingLayer (electronics)NanotechnologyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsFerroelectric and Piezoelectric Materials