High-resistivity with PN interface passivation in 22 nm FD-SOI technology for low-loss passives at RF and millimeter-wave frequencies
Lucas Nyssens, Martin Rack, Massinissa Nabet, C. Schwan, Zhixing Zhao, Steffen Lehmann, T. Herrmann, D. Henke, A. Kondrat, C. Soonekindt, Frieder Koch, T. Kache, D. P. Kini, O. Zimmerhackl, F. Allibert, C. Aulnette, Dimitri Lederer, Jean‐Pierre Raskin
Topics & Concepts
Materials sciencePassivationElectrical resistivity and conductivityOptoelectronicsWaferSilicon on insulatorCoplanar waveguideExtremely high frequencySubstrate (aquarium)SiliconDopingElectrical engineeringMicrowaveOpticsNanotechnologyPhysicsLayer (electronics)OceanographyEngineeringGeologyQuantum mechanicsRadio Frequency Integrated Circuit DesignMicrowave and Dielectric Measurement TechniquesMicrowave Engineering and Waveguides