Silicon-nanoforest-based solvent-free micro-supercapacitors with ultrahigh spatial resolution<i>via</i>IC-compatible<i>in situ</i>fabrication for on-chip energy storage
Cheng Chi, Dezhao Li, Yang Li, Xin Qi, He Huang, Qi Wang, Chongjia Lin, Xing Zhang, Weigang Ma, Baoling Huang
Abstract
Through an IC-compatible<italic>in situ</italic>approach, 3D silicon/nickel nanoforest based on-chip MSCs achieved ultrahigh spatial resolution and excellent electrochemical performance.
Topics & Concepts
SupercapacitorSiliconFabricationMaterials scienceIn situNanotechnologyChipNickelOptoelectronicsElectrochemistryElectrodeChemistryElectrical engineeringMetallurgyEngineeringPathologyAlternative medicineOrganic chemistryMedicinePhysical chemistrySupercapacitor Materials and FabricationAdvancements in Battery MaterialsAdvanced battery technologies research