Fabrication of 4H–SiC microvias using a femtosecond laser assisted by a protective layer
Bin Liu, Panpan Fan, Hongwei Song, Kai Liao, Wenjun Wang
Topics & Concepts
Materials scienceFemtosecondLaserBrittlenessLaser beam machiningLaser drillingSurface micromachiningLayer (electronics)FabricationOptoelectronicsComposite materialDrillingMachiningNanotechnologyOpticsMetallurgyLaser beamsPhysicsMedicinePathologyAlternative medicineAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSilicon Carbide Semiconductor Technologies