Ultra-thin on-chip ALD LiPON capacitors for high frequency application
Kunal Ahuja, Valentin Sallaz, R. Blake Nuwayhid, Frédéric Voiron, Patrick McCluskey, Gary W. Rubloff, Keith Gregorczyk
Topics & Concepts
CapacitorMaterials scienceCapacitanceElectrolytic capacitorFilm capacitorDecoupling capacitorOptoelectronicsCeramic capacitorFilter capacitorElectrical engineeringElectrical impedanceHigh-κ dielectricDielectricLCR meterInductanceVoltageChemistryEngineeringElectrodePhysical chemistryAdvancements in Battery MaterialsAdvanced Battery Materials and TechnologiesFerroelectric and Piezoelectric Materials