Modulation of ferroelectricity in atomic layer deposited HfO2/ZrO2 multilayer films
Haiyan Chen, Lin Tang, Hang Luo, Xi Yuan, Dou Zhang
Topics & Concepts
Materials scienceAtomic layer depositionFerroelectricityDielectricSpace chargePolarization (electrochemistry)OptoelectronicsLeakage (economics)Layer (electronics)High-κ dielectricDeposition (geology)NanotechnologyElectronPhysical chemistryBiologyPaleontologyPhysicsEconomicsChemistrySedimentQuantum mechanicsMacroeconomicsFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesMXene and MAX Phase Materials