Wafer-scale pulsed laser deposition of ITO for solar cells: reduced damage <i>vs.</i> interfacial resistance
Yury Smirnov, Pierre‐Alexis Repecaud, Leonard Tutsch, Ileana Florea, Kassio P. S. Zanoni, Abhyuday Paliwal, Henk J. Bolink, Pere Roca i Cabarrocas, Martin Bivour, Monica Morales‐Masis
Abstract
Halide perovskite and silicon heterojunction solar cells present sensitive contact layers prone to damage during ITO deposition. We study the effect of ITO pulsed laser deposition pressure on damage mitigation and improved solar cell performance.
Topics & Concepts
Materials scienceWaferOptoelectronicsPulsed laser depositionDeposition (geology)Perovskite (structure)HeterojunctionSolar cellLaserSiliconNanotechnologyThin filmChemical engineeringOpticsPaleontologyEngineeringSedimentBiologyPhysicsSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesPerovskite Materials and Applications