Implementing sustainability in laboratory activities: A case study on aluminum titanium nitride based thin film magnetron sputtering deposition onto commercial laminated steel
S. Fiameni, Simone Battiston, Valentina Castellani, Simona Barison, Lidia Armelao
Topics & Concepts
Sputter depositionPhysical vapor depositionMaterials scienceTitanium nitrideNitrideTitaniumElectricityDeposition (geology)SustainabilityAluminiumSputteringThin filmCavity magnetronProcess engineeringMetallurgyMechanical engineeringEnvironmental scienceNanotechnologyEngineeringLayer (electronics)Electrical engineeringSedimentBiologyEcologyPaleontologyAdvanced Sensor Technologies ResearchMaterial Selection and Properties