Silicon Wafers; Its Manufacturing Processes and Finishing Techniques: an Overview
Kheelraj Pandey, Ashwani Sharma, Ayush Singh
Topics & Concepts
WaferPolishingMaterials scienceChemical-mechanical planarizationAbrasiveSemiconductor device fabricationSiliconSemiconductorWafer backgrindingNanotechnologyEngineering physicsParticle (ecology)Mechanical engineeringMetallurgyOptoelectronicsWafer dicingEngineeringOceanographyGeologyAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research